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Practical Applications of Valves in the Semiconductor Industry
Fluid systems impose extremely stringent requirements on valves, which are core components in high-purity fluid systems within the semiconductor industry.
1. Isolation Valves
Angle Valves: The gas path in angle valves is typically at a right angle, making them ideal for connecting exhaust and pumping pipelines in vacuum systems, such as between the main pump and the fore pump (foreline) or between the chamber and the fore pump (roughing or pre-vacuum line). Angle valves are often used as isolation valves, especially in harsh environments, offering excellent reliability and can also serve a control function.
Gate Valves: The gate valve's closure member is a gate, which moves perpendicular to the flow direction of the medium. By raising or lowering the gate, it can isolate or connect the flow. Gate valves are typically used only in fully open or fully closed states, making them ideal isolation valves but less commonly used for control purposes. They can be used between the chamber and the vacuum pump.
2. Control Valves
Pendulum Valves: Used between the vacuum chamber and the molecular pump, control valves regulate flow and pressure. Pendulum valves, also known as swing valves, are the most commonly used type. Their closure member swings like a pendulum to achieve isolation and control functions. They feature compact design, low vibration, smooth opening and closing, and effectively avoid particle generation, making them widely used as control valves.
Butterfly Valves: Butterfly valves can also serve a control function, though they are less commonly used compared to pendulum valves in this context.
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